一．    設(shè)備簡介

One Equipment introduction

半導體超純水設(shè)備是應(yīng)用于半導體生產(chǎn)零件清洗的超純水設(shè)備，需要符合特定的用水水質(zhì)標準,半導體超純水設(shè)備出水水質(zhì)要符合美國ASTM純水水質(zhì)標準、中國電子工業(yè)電子級水質(zhì)技術(shù)標準(18MΩ.cm、15MΩ.cm、10MΩ.cm、2MΩ.cm、0.5MΩ.cm)、半導體工業(yè)用純水指標、集成電路水質(zhì)標準。 宏潔水務(wù)在滿足用戶用水標準的基礎(chǔ)上，在設(shè)備系統(tǒng)中水箱均設(shè)有液位控制系統(tǒng)、水泵均設(shè)有壓力保護裝置、在線水質(zhì)檢測控制儀表、電氣采用PLC可編程控制器，真正做到了無人職守，同時在工藝選材上采用推薦和客戶要求的方法，使設(shè)備與其它同類產(chǎn)品相比較，具有更高的性價比和設(shè)備可靠性。

Semiconductor ultra pure water equipment is an ultra pure water equipment used for cleaning semiconductor production parts, which needs to meet the specific water quality standards. The effluent quality of semiconductor ultra pure water equipment should meet the ASTM pure water quality standard of the United States and the electronic grade water quality technical standard of China Electronic Industry (18m) Ω. cm、15M Ω. cm、10M Ω. cm、2M Ω. cm、0.5M Ω. Cm), pure water index for semiconductor industry, integrated circuit water quality standard. On the basis of meeting the user's water use standard, Hongjie water has set up liquid level control system in the water tank of the equipment system, pressure protection device in the water pump, online water quality detection and control instrument, and PLC programmable controller in the electrical system, so that no one is on duty. At the same time, the method of recommendation and customer requirements is adopted in the process of material selection, so that the equipment is compared with other similar products, It has higher cost performance and equipment reliability.

二．    設(shè)計標準及依據(jù)

2 Design standard and basis

1. 根據(jù)用戶提供的詳細水質(zhì)報告“量身定制”。

1. According to the detailed water quality report provided by the user, "customized".

2. 水處理設(shè)備技術(shù)條件《JB/T 2932-1999》

2. Technical conditions of water treatment equipment JB / T 2932-1999

3. 反滲透水處理設(shè)備標準《CJ/T119-2000》

3. Standard for reverse osmosis water treatment equipment CJ / t119-2000

4. 低壓開關(guān)設(shè)備和控制設(shè)備成套裝置《IEC439-1 》

4. Complete set of low voltage switchgear and control equipment iec439-1

5. 實驗室超純水技術(shù)指標標準《GB6682-2008 》

5. Technical index standard of laboratory ultra pure water gb6682-2008

6. 電子級超純水規(guī)格《GB/T11446.1-1997》

6. Electronic grade ultra pure water specification GB / t11446.1-1997

三．    工藝流程

Three technological process

原水－原水箱－原水加壓泵 －絮凝劑/還原劑－活性炭過濾器 － 超濾－阻垢劑－保安過濾器－一級高壓泵－一級反滲透－PH 調(diào)節(jié)－中間水箱 －二級高壓泵－二級反滲透 －純化水箱－EDI增壓水泵-紫外燈殺菌器－精密過濾器－EDI系統(tǒng)－超純水箱－終端輸送泵－TOC脫除器－拋光裝置－終端濾器－用水點

Raw water - Raw water tank - Raw water booster pump - Flocculant/reducing agent - Activated carbon filter - Ultrafiltration - Scale inhibitor - Security filter - First stage high-pressure pump - First stage reverse osmosis - PH regulation - Intermediate water tank - Second stage high-pressure pump - Second stage reverse osmosis - Purified water tank - EDI booster pump - UV lamp sterilizer - Precision filter - EDI system - Ultra pure water tank - Terminal transfer pump - TOC remover - Polishing device - Terminal filter - Water point

目前市場上的工藝根據(jù)原水水質(zhì)和用水水質(zhì)要求不同，所用工藝也有所不同。

At present, the processes used in the market vary depending on the requirements for raw water quality and water quality.

超純水設(shè)備系統(tǒng)工藝介紹：

Introduction to the process of ultra pure water equipment system:

滿足用戶需要，達到符合標準的水質(zhì)，盡可能地減少各級的污染，在工藝設(shè)計上，取達國家自來水標準的水為源水，再設(shè)有介質(zhì)過濾器，活性碳過濾器，精密過濾器等預處理系統(tǒng)、雙級RO反滲透主機系統(tǒng)、EDI或離子交換混床系統(tǒng)等。

Satisfy user needs, achieve water quality that meets standards, and minimize pollution at all levels. In process design, take water that meets national tap water standards as the source water, and then install pre-treatment systems such as medium filters, activated carbon filters, precision filters, two-stage RO reverse osmosis host systems, EDI or ion exchange mixed bed systems, etc.

四．    設(shè)計特點

Four Design features

1. 系統(tǒng)采用全自動控制(同時亦可采用手動控制），系統(tǒng)運行時可設(shè)定自動反洗、再生程序；

1. The system adopts full automatic control (manual control is also available), and automatic backwashing and regeneration procedures can be set during system operation;

2. 各單元接線均在工廠內(nèi)完成，減少安裝調(diào)試時間；

2. The wiring of each unit is completed in the factory to reduce the installation and debugging time;

3. 一級反滲透和二級反滲透設(shè)有回流管道，反滲透設(shè)備設(shè)有化學清洗裝置；

3. The primary RO and secondary ro are equipped with return pipes, and the RO equipment is equipped with chemical cleaning device;

4. 管道一般采用UPVC材質(zhì)；

4. UPVC material is generally used for pipes;

5. 集成控制系統(tǒng)和集成儀表系統(tǒng)等，方便操作管理；

5. Integrated control system and instrument system to facilitate operation and management;

6. 部件更加耐用，長期無需維修；

6. The components are more durable and do not require maintenance for a long time;